Thin-film superconductor


PURPOSE: To obtain a thin film having excellent superconducting property in high reproducibility and composed of the 1st thin film of a multiple oxide of Bi having laminar structure containing plural Cu-O layers between ≥2 Bi-O layers by including an oxide film in the above 1st thin film structure. CONSTITUTION: In the case of producing a multiple oxide of Bi having laminar structure and composed of Bi-Sr-Ca-Cu-O, Bi 2 O 3 and an Sr-Ca-Cu compound are used as targets 21, 22 and alternately sputtered in a gaseous mixture of Ar and O 2 against a heated substrate 11 to form the 1st thin film 13 of a multiple oxide having laminar structure composed of a Bi-O layer 15, a Cu-containing layer 14 and a layer 15 on the substrate 11. A thin film 12 of Bi oxide having a structure similar to that of the 1st layer is formed on the thin film 13 by using a Bi oxide target 23 such as Bi 4 Ti 3 O 12 and a thin film 13 is formed on the film 12. The thin film having a structure formed by the above process has excellent and reproducible crystallinity and superconducting property. COPYRIGHT: (C)1990,JPO&Japio




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Cited By (4)

    Publication numberPublication dateAssigneeTitle
    EP-0590560-A2April 06, 1994Matsushita Electric Industrial Co., Ltd.Thin-film superconductor and method of fabricating the same
    EP-0590560-A3August 10, 1994Matsushita Electric Ind Co LtdThin-film superconductor and method of fabricating the same
    JP-H04132615-AMay 06, 1992Hokuriku Electric Ind Co LtdThin film of bismuth compound having laminar structure and its production
    US-5434126-AJuly 18, 1995Matsushita Electric Industrial Co., Ltd.Thin-film high Tc superconductor comprising a ferroelectric buffer layer