Laminated hard material and production thereof

Abstract

PURPOSE: To simply produce a laminated hard material with a well adhered multiple coating film having superior oxidation and machining resistances by coating a base material with a multiple coating film having (Ti, Al) N type structure contg. Al whose content has been stepwise or continuously increased from the base material side. CONSTITUTION: Ti and Al are vapor-deposited on a base material and simultaneously the base material is irradiated with nitrogen ions from an ion source. By this ion mixing method, a multiple coating film having (Ti, Al) N type structure contg. Al whose content has been stepwise or continuously increased from the base material side is formed on the base material. The cracking and peeling of the coating film due to an extreme difference in compsn. at the interface between the base material and the coating film is prevented and a laminated hard material suitable for wear resistant parts, a cutting tool, etc., is simply obtd. COPYRIGHT: (C)1990,JPO&Japio

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    JP-H02170965-AJuly 02, 1990Sumitomo Metal Mining Co LtdOxidation and wear resistant coated steel material
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    JP-H05285215-ANovember 02, 1993Takeshi Saito, Masaru Yamaoka, 大 山岡, 毅 斎藤Equipment coated with film of ti-al-n composition
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    US-6558776-B1May 06, 2003Lg.Philips Lcd Co., Ltd.Glass substrate for liquid crystal display device
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    US-7736461-B2June 15, 2010Lg Display Co., Ltd.Cassette for preventing breakage of glass substrate
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